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In this work we present our new experimental and numerical findings on high intensity (over 1018 W/m2) femtosecond interaction with nanostructured targets. We demonstrate, that the hot electron production and X-ray generation may be significantly enhanced when a nanostructured silicon, metal or carbon targets are utilized compared to the initially flat substrate. The modification of the target surface was made by electrochemical etching in case of silicon and by laser ablation for metal. Varying the parameters the structures with different shape and size (subwavelength nanograss, nanopores, bubbles, cones) could be obtained. The advantage of these methods is that it allows formation of large area samples with high repetitively suitable for laser-plasma experiments with high repetition rate. We also used thick layer of carbon nanotubes as target.