ИСТИНА

In this work, we study resonant charge transfer (RCT), which is important in diagnostics of the surface composition by low energy ion scattering (LEIS-method). It should be noted that the LEIS method has the best surface sensitivity [7-9]. In most experimental setups, positively charged ions are detected; therefore, it is necessary to determine such characteristics as the probability of neutralization and the scattering cross section, otherwise the analysis of the spectra of scattered ions will give an inaccurate result in determining the surface composition.