ИСТИНА

In this work, 2D model of inductively coupled plasma discharge in oxygen were developed. The complete scheme of the vibrational kinetics of O2 molecules was included in the model. The rate constants of the excitation and de- excitation processes for vibrationally excited levels of the O2 molecule in reactions with O atoms were calculated based on obtained inelastic cross-sections of the O2 + O system in the ground state for a set of initial vibrational and rotational states of O2 molecule. These rate constants as well as calculated vibrational electron scattering cross-sections of O2 were included in model and the results were compared with literature data. The vibrational distribution function was calculated in low-pressure inductively coupled discharge. Spatial distributions of plasma parameters were also obtained.