ИСТИНА

In this work, thin films of hafnium oxide were obtained, which were subsequently annealed in a furnace in an air atmosphere. To study the optical properties of the films, Raman spectra were measured, which provide information about the crystal structure of the samples under investigation. The spectra were measured using a Horiba HR-800 micro-Raman spectrometer. A helium-neon laser with a wavelength of 633 nm was used for excitation. 10x, 50x and 100x objectives were applied to focus the laser beam.