ИСТИНА

Modern nanophotonics requires novel techniques for the fabrication of the main elements. Among others, the twophoton laser lithography (TPLL) attracts much attention due to its unique possibilities and flexibility in operation. Here we present our recent results on application the TPLL for the fabrication of polymer optical waveguides with the diameter 0.5- 2 µm and of 20 µm in length, detached from the substrate and supplemented by polymer prisms adapters. We demonstrate that optical losses of the whole structure with 2 µm thick polymer waveguide are about 50% at the wavelength of 450 nm and increase up to 89% for 1300 nm. Numerical modeling confirm the experimental results.