ИСТИНА

Integration of nanobiosensors with acoustic delay lines within planar technologies gives a chance to develop the acousto-nanoelectronic sensors with high sensitivity and selectivity. This type of sensors can be used to register biospecific interactions, to detect various biological objects, to monitor sensitivity of bioobjects towards various antibiotics, etc. In present paper the acoustoelectronic chip sensor implemented on lithium niobate plate with a system of interdigital transducers (IDTs) for exciting proper acoustic wave is developed. The sensor is inserted into the chip holder of the standard socket of knife type. Acoustoelectronic devices is calculated for anti-symmetric (A0) and symmetric (S0) Lamb waves as well as shear-horizontal wave (SH0) of the zero order. The area, 80х80 μm2 in square, is located in the centre of the chip for formation of a nanostructure. The sensing properties of the nanostructure are modified by its vibration produced by proper acoustic wave, propagating through bio-active area. Fabrication of the integrated sensor is accomplished by standard lithography, various photoresist, and reactive ion etching. The as-developed device is considered as a prototype of a nanoelectronic transducer, where nanostructures or nanogaps for realization of molecular transistors on the basis of proteins-enzymes are created.