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We have demonstrated that under femtosecond laser (I~1015 W/cm2, E~5mJ) excitation of large molecular clusters (SF6, CF3I, CF2Cl2) formed in the carrier gas Ar, the energy conversion efficiency to hard X-ray lines achieve ~10-5 (with yield ~1010 photons/J). Laser excitation of gas mixture (CF2Cl2-Ar) results in generation of X-ray K-lines of both Cl and Ar that confirms the presence of mixed CF2Cl2 /Ar clusters.