ИСТИНА

The present research is devoted to the experimental investigation of the electron stimulated desorption [1] on the sapphire (Al2O3) surface. The goal is to obtain island films of Al and reveal the main factors which affect on the island films form and size. The numerous experiments have shown that main factor which affect on the island film growth process is the electron irradiation dose. E.g. for the irradiation dose 1019 electrons/sm2 the average island radius is about 40 nm, for the dose 1021 electrons/sm2 the average radius rise to 100 nm. The island film thickness is about 5-10 nm.