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Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposesпатент
- Авторы: Алёшин С.В., Медведева М.Г., Егоров Е.Е., Родин С.Б.
- Номер: 6,988,260
- Дата публикации патента: 17 января 2006 г.
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Реферат (описание изобретения):
The present invention is directed to a method and apparatus for optimizing fragmentation of integrated circuit boundaries for optical proximity correction (OPC) purposes. The present invention may balance the number of vertices and the "flexibility" of the boundary and may recover fragmentation according to the process intensity profile along the ideal edge position to obtain the best decision for OPC.
- Добавил в систему: Родин Сергей Борисович