Carbon masks for the fabrication of submicron YBa2Cu3Ox bridges and Josephson junctionsстатья
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Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:A technology is worked out for the fabrication of thin-film submicron YBa2CU3Ox Josephson junctions on bicrystal substrates. The masks fabricated on carbon films prepared by laser ablation technique are used for the ion beam etching of YBa2CU3Ox thin films. Carbon deposition regimes are obtained that allow one to preserve the superconducting properties of YBa2CU3Ox thin films.