Improving the accuracy of broad-band monitoring of optical coating depositionстатья
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Дата последнего поиска статьи во внешних источниках: 3 ноября 2018 г.
Аннотация:A method for improving the accuracy of the broad-band monitoring of the process of depositing optical coatings is proposed. The method is based on determining the actual set of thicknesses of deposited layers in the deposition process. The effectiveness of the proposed approach is demonstrated in a series of model numerical experiments using a simulator of deposition process.