Writing of 3D optical integrated circuits with ultrashort laser pulses in the presence of strong spherical aberrationстатья
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Дата последнего поиска статьи во внешних источниках: 25 января 2019 г.
Аннотация:A novel technique was proposed for 3D femtosecond writing of waveguides and optical integrated circuits in the presence of strong spherical aberration, caused by inscription at significantly different depth under the surface of optical glasses and crystals. Strong negative effect of spherical aberration and related asymmetry of created structures was reduced due to transition to the cumulative thermal regime of femtosecond interaction with the material. The differences in the influence of spherical aberration effect in a broad depth range (larger than 200 µm) was compensated by dynamic adjustment of laser pulse energy during the process of waveguides recording. The presented approach has been experimentally implemented in fused silica. Obtained results can be used in production of a broad class of femtosecond written three-dimensional integrated optical systems, inscripted at non-optimal (for focusing lens) optical depth or in significantly extended range of depths.