Modeling of bright EUV source based on specially prepared plasmaтезисы доклада
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Авторы:
Kim D.A.,
Novikov V.G.,
Ivanov V.V.,
Medvedev V.V.,
Koshelev K.N.,
Krivtsun V.M.,
Dolgoleva G.V.
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Сборник:
26th Symposium on Plasma Physics and Technology, June 16–19 2014, Czech Technical University in Prague, Faculty of Electrical Engineering, Technicka 2, Prague 6, Czech Republic
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Тезисы
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Год издания:
2014
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Добавил в систему:
Долголева Галина Владимировна