Spectroscopy, actinometry and simulation of a DC discharge in CO/H2 gas mixtures

Авторы: Filippov A.V., Mankelevich Y.A., Pal A.F., Rakhimov A.T., Serov A.O., Suetin N.V.
Сборник: Proceedings of SPIE - The International Society for Optical Engineering
Год издания: 2002
Первая страница: 285
Последняя страница: 295
DOI: 10.1117/12.459406
Аннотация: We have studied the gas heating and dissociation processes in the direct current (DC) discharge CVD reactor with the closed gas circuit where the working gas mixture is used repeatedly by circulation through the discharge area. Experiments were carried out in mixtures of CO with hydrogen at overall gas pressure of 20 kPa and gas flow up to 40 m/s. The discharge plasma was analyzed by actinometry and optical emission spectroscopy. Two-dimensional model of DC discharge CVD reactor has been used to study reactive gas flow, electrodynamics and surface processes. The 2D calculations show that the most important radical production reactions are the CO and H2 dissociation due to electron impact. Calculated results are compared with the experimental ones.
Добавил в систему: Паль Александр Фридрихович

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