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On-line Re-engineering of Interference Coatingsтезисы доклада
- Авторы: Wilbrandt S., Stenzel O., Kaiser N., Trubetskov M.K., Tikhonravov A.V.
- Сборник: Optical Interference Coatings, OSA Technical Digest (CD) (Optical Society of America, 2007)
- Тезисы
- Год издания: 2007
- Место издания: Tucson, AZ, Washington, DC
- Первая страница: WC10
- Аннотация: We demonstrate the potentialities of our new optical monitor (OptiMon) to perform transmission measurements, re-engineering and recalibration of quartz monitor tooling factors during a deposition process. Examples include single layers as well as high-low stacks.
- Добавил в систему: Тихонравов Александр Владимирович