Plasma parameters in a dual-camera low-power inductive RF discharge with an external magnetic fieldстатья
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Дата последнего поиска статьи во внешних источниках: 26 сентября 2016 г.
Аннотация:Abstract. The results from studying a dual-camera inductive radio-frequency (RF) discharge that was placed
in an external magnetic field are presented. The operating conditions were as follows: an argon pressure of
5 × 10–5–6 × 10–2 Torr, an external magnetic field strength of 0–60 G, and an RF generator power supply
of 25–300 W. During the experiment the resonant RF power consumption and the correspondence between
the local power-consumption maxima and spatial maxima of the plasma concentration as a function of the
external magnetic field were observed. The comparison of the experimental results with the results of the
mathematical simulation indicates that the resonant character of the discharge is associated with the excitation
of helicons and Trivelpiece–Gould waves.