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Plasma parameters in a dual-camera low-power inductive RF discharge with an external magnetic fieldстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 26 сентября 2016 г.
- Авторы: Petrov A.K., Vavilin K.V., Kozlov G.P., Kralkina E.A., Nekliudova P.A., Nikonov A.M., Pavlov V.B.
- Журнал: Moscow University Physics Bulletin
- Том: 70
- Номер: 6
- Год издания: 2015
- Издательство: Allerton Press
- Местоположение издательства: New York, N.Y., United States
- Первая страница: 527
- Последняя страница: 535
- DOI: 10.3103/s0027134915060144
- Аннотация: Abstract. The results from studying a dual-camera inductive radio-frequency (RF) discharge that was placed in an external magnetic field are presented. The operating conditions were as follows: an argon pressure of 5 × 10–5–6 × 10–2 Torr, an external magnetic field strength of 0–60 G, and an RF generator power supply of 25–300 W. During the experiment the resonant RF power consumption and the correspondence between the local power-consumption maxima and spatial maxima of the plasma concentration as a function of the external magnetic field were observed. The comparison of the experimental results with the results of the mathematical simulation indicates that the resonant character of the discharge is associated with the excitation of helicons and Trivelpiece–Gould waves.
- Добавил в систему: Петров Александр Кириллович