Аннотация:Nowadays plasma-assisted ablation of materials by ultrashort laser pulses is very attentive field of fundamental research and can be considered as a promising tool in a number of applications. There's often the need for laser drilling of inhomogeneous target that represent a layered structure in such way as to produce a hole within one layer without affecting the other. These tasks are typical in the field of precise micromachining of multi-chip modules or inmicrosurgery when perforation should be done in bone tissue with no affection on the nearby blood vessels and nerve fibers. Naturally, there is an urgent need of on-line monitoring of laser perforation.
We have shown that drilling of multi-layered structures placed in the air by tightly focused femtosecond laser radiation with high fluence (up to 1000 J/cm2) can be monitored online using plasma-induced X-ray emission and second harmonic of incident laser pulse. Technique based on X-rays registration appeared to be more flexible than the method based ondetection of second harmonic since its accuracy depends crucially on target type.
We demonstrated that the X-ray signal clearly indicates the transition from one layer to another during the microdrilling of targets consisting of 2-4 layers of titanium foil when fs-laser beam is focused beneath the target surface at a depth comparable to the layer thickness.
The diagnostics of microchannel production in chicken eggshell was firstly performed. It was found that the presence of albumen beneath a shell accounts for longtime generation of X ray pulses.