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Structure of RF fields in a twin-chamber radio-frequency inductive plasma source placed in a weak external magnetic fieldстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 2 декабря 2020 г.
- Авторы: Petrov A.K., Kralkina E.A., Nikonov A.M., Vavilin K.V., Zadiriev I.I.
- Журнал: Vacuum
- Том: 181
- Год издания: 2020
- Издательство: Elsevier Ltd
- Местоположение издательства: London
- Номер статьи: 109634
- DOI: 10.1016/j.vacuum.2020.109634
- Аннотация: An experimental study of the structure of waves excited in the low-pressure inductive radio-frequency discharge located in the magnetic field with inductance less than 70 Gs was carried out. A plasma source consisting of gas-discharge and process chambers was used in the work. The results of the wave structure study showed that a partially traveling wave was excited in the plasma source when a certain threshold value of the induction of an external magnetic field was exceeded and when a metal flange separating the gas discharge and processing chambers was used. It was also noted that the above-mentioned threshold value decreased with an increase in operating frequency. The amplitude and phase profile of the Bz component of the RF wave indicates the presence of waves reflected from the bottom flange and the local minimum of the electron concentration within the junction of the gas-discharge and process chambers.
- Добавил в систему: Никонов Александр Михайлович