Stable method for optical monitoring the deposition of multilayer optical coatingsстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 8 января 2021 г.
Аннотация:For optical monitoring of layer thickness in the deposition of multilayer optical coatings, a stable method is proposed that completely eliminates the cumulative effect of errors in the thicknesses of deposited layers. The considered monitoring method relies on a nonlocal algorithm for analyzingdata measured in the course of coating deposition monitoring. Computer simulation of coating deposition is used to demonstrate the effectiveness of the proposed type of monitoring as compared with other optical monitoring methods.