Аннотация:Modeling the processes of forming contact regions (interface) of the multilayer niobium cobaltnanosystem is carried out. The morphology and composition of a multilayer nanosysteminterface is investigated. The layer boundaries morphology is shown to depend on the depositionsubstrate temperature and, largely, is determined by preparing the surface for deposition. The workconsiders the deposition surface modification by removing its defects. Simulation showed thatsurface preparation significantly affects the morphology and composition of a multilayernanosystem interface, depending on the type of deposited atoms and atoms forming the depositionsurface.