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Strategies of broadband monitoring aimed at minimizing deposition errorsстатья
- Авторы: Tikhonravov A., Kochikov I., Matvienko I., Isaev T., Yagola A.
- Сборник: Optical Thin Films and Structures: Design and Advanced Applications/ Ed.Ts.Babeva
- Глава в коллективной монографии
- Год издания: 2021
- Издательство: MDPI
- Местоположение издательства: Basel, Switzerland
- Первая страница: 5
- Последняя страница: 14
- Аннотация: This article presents a computational approach for comparing various broadband monitoring strategies, taking into account the positive and negative effects associated with the correlation of thickness errors caused by the monitoring procedure. The approach is based on statistical estimates of the strength of the error self-compensation effect and the expected level of thickness errors. Its application is demonstrated by using a 50-layer, nonpolarizing edge filter. The presented approachis general and can be applied to verify the prospects of broadband monitoring for the production of various types of optical coatings.
- Добавил в систему: Ягола Анатолий Григорьевич