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Optical monitoring of coating production: correlation of errors and errors self-compensationстатья
Информация о цитировании статьи получена из
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Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 4 марта 2022 г.
- Авторы: Tikhonravov A., Kochikov I., Sharapova S., Yagola A.
- Журнал: Proceedings of SPIE - The International Society for Optical Engineering
- Том: 11872
- Номер: Advances in Optical Thin Films VII,118720Q (12 September 2021)
- Год издания: 2021
- Издательство: SPIE, the International Society for Optical Engineering
- Местоположение издательства: Bellingham, WA, United States
- Первая страница: 1
- Последняя страница: 7
- DOI: 10.1117/12.2597765
- Аннотация: It is shown that the previously proposed geometric approach adequately describes the effect of error correlation based on the results of computational manufacturing experiments with the selected type of optical monitoring. The question of a sufficient number of simulation runs is investigated, and it is shown that a reliable estimate of the correlation coefficient describing the strength of the error correlation effect is obtained with a realistic number of computational manufacturing experiments. To investigate the presence of the error self-compensation effect, the error self-compensation coefficient is introduced. Using sets of correlated error vectors obtained in computational manufacturing experiments, the probability density function of the distributions of this coefficient is calculated. To assess the strength of the error self-compensation effect, the estimate is proposed based on a comparison of the influence of correlated and uncorrelated thickness errors.
- Добавил в систему: Ягола Анатолий Григорьевич