Three-dimensional scanning electron microscopy of surface topography with consideration of the effect of the response function of the detector systemстатья
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Дата последнего поиска статьи во внешних источниках: 15 декабря 2021 г.
Аннотация:An experimental system for detection of back-scattered electrons (BSE) in the scanning electron microscope (SEM) for three-dimensional (3D) visualization of the microstructure topography is described. The 3D surface topography reconstruction is carried out according to thealgorithm of profile reconstruction fromthe preliminarily determined angular dependencies of BSE with the use of a calibration specimen. It is shown that the instrument function of the detector system, i.e., the detector response function, as well as the geometric factor, that takes the transformation of the angle distribution for single and multiple scattering of BSEs into consideration, cause a significant impact on the detected signal.