Magnetron deposition of a-C:ND coatings by nanodiamond transfer: pulse number impact on aggregation and graphitization

Авторы: Streletskiy Oleg A., Zavidovskiy Ilya A., Sychev Vladimir V., Dudin Alexander A., Savinov Sergey A., Pavlikov Alexander V.
Журнал: Applied Physics A
Том: 128
Номер: 1
Год издания: 2022
Номер статьи: 83
DOI: 10.1007/s00339-021-05229-7
Аннотация: The possibilities of the synthesis of nanodiamond/amorphous carbon composite structures (a-C:ND) by the pulsed mode of direct current magnetron sputtering are analyzed in the current paper. We showed that the ion-induced microarcing on the substrate surface caused the transfer of nanodiamond particles of an average size of 4.5 nm, whose size distribution is close to one of the precursor particles. According to the structural investigations carried out by transmission electron microscopy, electron difraction, Raman spectroscopy and electron energy loss spectroscopy, the coatings with uniformly distributed nanodiamond inclusions can be obtained at a low number of discharge pulses. The particles transferred at 10 pulses preserve their luminescence properties and become encapsulated in the sp3-rich carbon matrix. However, with a higher number of pulses, graphitization and agglomeration of the particles induced by microarcing and ion irradiation are observed. Share link: https://rdcu.be/cEakb
Добавил в систему: Завидовский Илья Алексеевич

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