Аннотация:We have investigated the optical resonance and near field effects of 2D periodic and absorptive polystyrene (PS) microspheres on Si wafers. The light scattering and coupling of neighbored PS spheres was numerically studied. Nanostructures were prepared on Si substrates using the regular 2D arrays by a single pulsed laser irradiation (KrF, ¿ = 248 nm). Periodical PS nanoparticle, PS nanoflowers and Si nanobumps were fabricated by different laser fluence. Mechanisms for PS particle size reduction and Si nanobump formation by laser irradiation were discussed on the base of the theoretical calculations. Good agreement between theoretical calculations and experimental results has been observed.