Аннотация:Ablation with nanoscale spatial resolution needs special tools to overcome conventional diffraction limit. A few methods have been successfully applied for this purpose. These include: surface nanostructuring by laser illuminated tip; Near-field Scanning Optical Microscopy (NSOM) nano-patterning; Surface nano-processing based on optical resonances and near-field effects with transparent particles as well as the field enhancement by plasmonic nanoparticles. All these methods permit localized laser ablation on the scale beyond 100 nm. In this paper we report our recent work related to field enhancement by laser illuminated tip, near-field laser ablation with transparent particles and field enhancement by plasmonic effects.