Аннотация:It is shown that a high concentration of laser-induced point defects (interstitials, vacancies), interacting with each other through deformation field, phase transition with formation of nanometer periodic Defect-Deformational- structure occurs, accompanied by appearance of modulation of the surface relief. The shape, period and amplitude of relief modulation are determined as functions of defect concentration. It is shown that the local field factor at metal surface undergoes resonance increase (102 times) under scanning of the temperature in vicinity of roughening transition point lying just below the melting point