|
ИСТИНА |
Войти в систему Регистрация |
ИСТИНА ИНХС РАН |
||
The self-consistent character of the rf inductive dischargeтезисы доклада
- Авторы: Alexandrov A.F., Kralkina E.A., Nekludova P.A., Pavlov V.B., Petrov A.K., Rukhadze A.A., Vavilin K.V.
- Сборник: Book of Abstracts 4th Workshop on Radio Frequency Discharges
- Тезисы
- Год издания: 2013
- Место издания: France
- Первая страница: 24
- Последняя страница: 24
- Аннотация: At the end of XXth century it became evident that RF power of the RF power supply is not coupled totally to plasma but is redistributed between two channels: plasma and the elements of the external circuit possessing active resistance. The power lost in the external circuit is determined by the ratio between the active resistance of the external circuit and the plasma equivalent resistance and can comprise a significant fraction of the RF power supply power. The RF power of the RF power supply PGen is coupled not only to plasma characterized by the plasma equivalent resistance but also to external load of the discharge characterized by antenna active resistance , So, the following expressions are valid: (1) (1a) It is obvious that plasma parameters are determined by the power value absorbed by plasma. In turn plasma parameters determine the plasma equivalent resistance and thus the power value coupled to plasma. This means that under conditions when , the self-consistent character of RF power redistribution between plasma and external load takes place. It gives rise to a number of physical effects. Basing on the idea of RF power redistribution between plasma and external load a number of physical effects such as hysteresis of the plasma parameters dependencies on the RF power supply and magnetic field value, saturation of the power input to plasma in the realm of high electron density and etc. were explained. The strategy of RF inductive sources development is proposed.
- Добавил в систему: Петров Александр Кириллович
Прикрепленные файлы
| № | Имя | Описание | Имя файла | Размер | Добавлен |
|---|---|---|---|---|---|
| 1. | Полный текст | THE_SELF-CONSISTENT_CHARACTER_OF_THE_RF_INDUCTIVE_DISCHARGE… | 28,0 КБ | 19 декабря 2013 [AlPetrov57] |