The effect of focusing on the lateral resolution of an interference microscopeстатья
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Дата последнего поиска статьи во внешних источниках: 19 июня 2014 г.
Аннотация:The dependence of the lateral resolution of an interference microscope on the distance between the phase step and the focal plane of the objective of the microscope object channel is analyzed. The results of measurements at several wavelengths, obtained by numerical modeling over a wide range of heights of the phase step and by processing actual phase images, are compared.