An Error Self-Compensation Mechanism for Deposition of Optical Coatings with Broadband Optical Monitoringстатья
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Аннотация:An error self-compensation mechanism is investigated for use during the deposition of optical coatings with broadband optical monitoring. The correlation of thickness errors caused by monitoring procedure is mathematically described. It is shown that this correlation of errors may result in the effect of selfcompensation of errors.