Calculation of the Electron Emission Coefficient during Fast Ion Passage trough Siliconстатья
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Дата последнего поиска статьи во внешних источниках: 23 января 2026 г.
Аннотация:A method based on perturbation theory for describing ion–atom ionization collisions and an algo-rithm for statistical modeling of secondary electron trajectories are proposed for calculating the electronemission coefficient from a structureless solid target. The main contribution to the number of electrons emit-ted from the surface comes from electrons with energies Ee < 50 eV. Only a small target layer with a thicknessof 20–40 Å determines the number of electrons emitted from the surface. If the target thickness exceeds thisvalue, the electron emission coefficient does not depend on the target thickness. The change in the energyand charge of a fast ion in such a thin layer can be ignored, and the energy and charge of an ion emitted from the target can be used to estimate the number of secondary electrons.