|
ИСТИНА |
Войти в систему Регистрация |
ИСТИНА ИНХС РАН |
||
Influence of small additives of nitrogen in 1D-modeling of non-uniform microwave discharge of low pressure in hydrogenстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 6 февраля 2018 г.
- Авторы: Lebedev Yu A., Tatarinov A.V., Epstein I.L.
- Журнал: Journal of Physics: Conference Series
- Том: 927
- Год издания: 2017
- Издательство: IOP Publishing
- Местоположение издательства: [Bristol, UK], England
- Первая страница: 012029
- DOI: 10.1088/1742-6596/927/1/012029
- Аннотация: A one-dimensional simulation for studying the influence of small additives of nitrogen to the parameters and structure of non-uniform microwave discharge in hydrogen at pressure of 1 Torr has been performed. It is shown that the profiles of the electron density and microwave field are affected by changes both in the EEDF and in the ionic constituent of the plasma. The EEDF influences in a spherical region of the discharge (away from the central electrode). The addition of nitrogen increases the mobility of electrons and leads to reduction of size of the plasma formation. The change in the ion components of plasma (N2H+ becomes the main ion) affects the structure of the plasma near the surface of the electrode.
- Добавил в систему: Эпштейн Ирина Львовна