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Статьи в журналах
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- 2021 Application of the Spectral Ellipsometry Method to Study the Processes of Atomic Layer Deposition
- Miakonkikh A.V., Smirnova E.A., Clemente I.E.
- в журнале Russian Microelectronics, издательство Maik Nauka/Interperiodica Publishing (Russian Federation), том 50, № 4, с. 230-238 DOI
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- 2018 Low-k protection from F radicals and VUV photons by multilayer pore grafting approach
- Zotovich Alexey, Rezvanov Askar, Chanson Romain, Zhang Lin, Hacker Nigel, Kurchikov Konstantin Alekseevich, Klimin Sergey, Zyryanov S.M., Lopaev D., Gornev Evgeny, Clemente Iosif, Miakonkikh Andrew, Maslakov K.I.
- в журнале Journal of Physics D - Applied Physics, издательство IOP Publishing ([Bristol, UK], England), том 51, № 32, с. 325202 DOI