–
Статьи в журналах
-
- 2002 Transient-enhanced diffusion in shallow-junction formation
- Fiory A.T., Chawda S.G., Madishetty S., Mehta V.R., Ravindra N.M., Mccoy S.P., Lefrançois M.E., Bourdelle K.K., Mckinley J.M., Gossmann H.J L, Agarwal A.
- в журнале Journal of Electronic Materials, издательство Institute of Electrical and Electronics Engineers (Piscataway, NJ, United States), том 31, № 10, с. 999-1003 DOI
-
- 2001 Implant Dose and Spike Anneal Temperature Relationships
- Bourdelle K.K., Fiory A.T., Gossmann H.J L, McCoy S.P.
- в журнале Materials Research Society symposia proceedings. Materials Research Society, издательство North Holland (Amsterdam, Netherlands), том 669 DOI
Статьи в сборниках
-
- 2001 Rapid thermal activation and diffusion of boron and phosphorus implants
- Fiory A.T., Chawda S.G., Madishetty S., Mehta V.R., Ravindra N.M., McCoy S.P., Lefrancois M.E., Bourdelle K.K., McKinley J.M., Gossmann H.J L, Agarwal A.
- в сборнике 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001, место издания RTP DOI