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Статьи в журналах
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- 2018 Low-k protection from F radicals and VUV photons by multilayer pore grafting approach
- Zotovich Alexey, Rezvanov Askar, Chanson Romain, Zhang Lin, Hacker Nigel, Kurchikov Konstantin Alekseevich, Klimin Sergey, Zyryanov S.M., Lopaev D., Gornev Evgeny, Clemente Iosif, Miakonkikh Andrew, Maslakov K.I.
- в журнале Journal of Physics D - Applied Physics, издательство IOP Publishing ([Bristol, UK], England), том 51, № 32, с. 325202 DOI
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- 2017 Pore surface grafting of porous low-k dielectrics by selective polymers
- Rezvanov Askar, Zhang Liping, Watanabe Mitsuhiro, Krishtab Mikhail B., Zhang Lin, Hacker Nigel, Verdonck Patrick, Armini Silvia, de Marneffe Jean-François G.N.G
- в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 35, № 2, с. 021211-021211 DOI