Proc. of Advanced Semiconductor Manufacturing Conference 2012, IEEE Conference Publicationsсборник

Статьи, опубликованные в сборнике

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  • 2012 Analysis of an effect of perturbations in SWHM and illuminating optical scheme parameters on an aerial image
  • Borisov M.V., Chelyubeev D.A., Chernik V.V., Gavrikov A.A., Knyazkov D.Yu, Mikheev P.A., Rakhovskiy V.I., Shamaev A.S.
  • в сборнике Proc. of Advanced Semiconductor Manufacturing Conference 2012, IEEE Conference Publications, с. 165-169 DOI