59-th Annual Gaseous Electronics Conference (GEC), 10-13 October 2006, Columbus, Ohio, USAсборник

Статьи, опубликованные в сборнике

---

• • 2006 Capacitive Coupled Single- and Dual-Frequency RF Plasma in Argon
  • Proshina O.V., Braginsky O.V., Ivanov V.V., Kovalev A.S., Lopaev D.V., Rakhimova T.V., Vasilieva A.N.
  • в сборнике 59-th Annual Gaseous Electronics Conference (GEC), 10-13 October 2006, Columbus, Ohio, USA, место издания Columbus, Ohio, USA
• • 2006 Experimental and Theoretical Study of Ion Energy Distribution Function in the Single and Dual Frequency Capacitive Coupled RF Discharge in Argon Plasma
  • Braginsky O.V., Kovalev A.S., Lopaev D.V., Mankelevich Yu A., Olevanov M.A., Proshina O.V., Rakhimova T.V., Vasilieva A.N., Voloshin D.G.
  • в сборнике 59-th Annual Gaseous Electronics Conference (GEC), 10-13 October 2006, Columbus, Ohio, USA, место издания Columbus, Ohio, USA
• • 2006 High Efficiency Singlet Oxygen Generator (SOG) Based on RF Discharge
  • Proshina O.V., Braginsky O.V., Kovalev A.S., Lopaev D.V., Mankelevich Yu A., Olevanov M.A., Rakhimova T.V., Vasilieva A.N.
  • в сборнике 59-th Annual Gaseous Electronics Conference (GEC), 10-13 October 2006, Columbus, Ohio, USA, место издания Columbus, Ohio, USA
• • 2006 Investigation of the Spatial Distribution Evolution of Electron Temperature in Capacitive Coupled Single- and Dual-Frequency RF Plasmas in Ar/O2 mixture over the RF Period
  • Belostotsky S.G., Braginsky O.V., Kovalev A.S., Lopaev D.V., Rakhimova T.V., Vasilieva A.N.
  • в сборнике 59-th Annual Gaseous Electronics Conference (GEC), 10-13 October 2006, Columbus, Ohio, USA, место издания Columbus, Ohio, USA
• • 2006 Possible Mechanism of “Additional” Production of Hydrogen Negative Ions in a H2 Glow Discharge
  • Belostotsky S.G., Economou D.J., Lopaev D.V., Rakhimova T.V.
  • в сборнике 59-th Annual Gaseous Electronics Conference (GEC), 10-13 October 2006, Columbus, Ohio, USA, место издания Columbus, Ohio, USA