ИСТИНА |
Войти в систему Регистрация |
|
ИСТИНА ИНХС РАН |
||
The porous hydrocarbon bridged low-k films are now considered as the perspective materials for advanced interconnectors technology because of their exceptional elastic stiffness predicted by molecular dynamics calculations. To the moment, there is no theoretical calculations of dielectric constants (DC) for such materials in literature and we decided to predict these values on base of our numerical approach developed recently.