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Nanomachining and design of array sensors on nanoporous alumina by chemical photolithographyтезисы доклада
- Авторы: Boytsova O.V., Klimenko A.A., Napolskii K.S., Lebedev V., Lukashin A.V.
- Сборник: Advanced metals, ceramics and composites, The 12-th China-Russia symposium on advanced materials and technologies (CRSAMT2013), Book of reports
- Том: 1
- Тезисы
- Год издания: 2013
- Место издания: Yunnan Publishing Group Corporation, Yunnan Science and Techmology Press, Kunming Kunming, China
- Первая страница: 18
- Последняя страница: 21
- Аннотация: We concentrated on the self-organization processes due to the synthesis and modification of film nanoporous anodic alumina (AAO) surface, which is promising as well as biosensors. The microstructured surface was obtained by combining anodization of Al-foil and photolithography on thin film of nanoporous Al2O3. Arrays sensors after chemical lithography were determined using atomic force microscopy and scanning electron microscopy. Preliminary resonance frequency measurements indicate that the microcantilevers can be used directly for sensing application
- Добавил в систему: Бойцова Ольга Владимировна