Plasma Etch and Strip in Microthechnology (PESM 2019). Book of abstracts. May 20–21, 2019, Grenoble, Franceсборник

Статьи, опубликованные в сборнике

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• • 2019 Dry cleaning of transition-metal dichalcogenides using reducing downstream plasma
  • Marinov D., de Marneffe J.F., Zhang J., With P., Smets Q., Arutchelvan G., Voronina E., Mankelevich Yu, Rakhimova T., et al.
  • в сборнике Plasma Etch and Strip in Microthechnology (PESM 2019). Book of abstracts. May 20–21, 2019, Grenoble, France, место издания MINATEC Grenoble, France, тезисы, с. 100-101
• • 2019 Pore sealing in low-k dielectrics by low-energy ions
  • Voronina E.N., Lopaev D.V., Mankelevich Yu A., Rakhimova T.V., Sycheva A.A.
  • в сборнике Plasma Etch and Strip in Microthechnology (PESM 2019). Book of abstracts. May 20–21, 2019, Grenoble, France, место издания MINATEC Grenoble, France, тезисы, с. 52-53