Proceedings of International Symposium on Plasma Chemistry (ISPC 19), July 27-31 2009, Bochum, Germanyсборник
Статьи, опубликованные в сборнике
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2009
Radical Production in RF CCP Discharge at 81 MHz Frequency in CHF3/Ar and CF4/Ar Mixtures. Theory and Experiment
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Malykhin E.M.,
Braginsky O.V.,
Kovalev A.S.,
Lopaev D.V.,
Proshina O.V.,
Rakhimova T.V.,
Rakhimov A.T.,
Vasilieva A.N.,
Zyryanov S.M.
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в сборнике Proceedings of International Symposium on Plasma Chemistry (ISPC 19), July 27-31 2009, Bochum, Germany, место издания Bochum, Germany, с. 362
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2009
The Spatial Distribution of Radicals in the Dual Frequency (1.76 MHz /81 MHz) Capacitive Discharge in CHF3/Ar and CF4/Ar Mixtures
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Braginsky O.V.,
Klopovskiy K.S.,
Kovalev A.S.,
Lopaev D.V.,
Proshina O.V.,
Rakhimova T.V.,
Rakhimov A.T.,
Vasilieva A.N.,
Voloshin D.G.
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в сборнике Proceedings of International Symposium on Plasma Chemistry (ISPC 19), July 27-31 2009, Bochum, Germany, место издания Bochum, Germany, с. 39