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Статьи в журналах
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- 2025 Utilizing Porous Low-k Dielectrics for Self-Monitoring of Vacuum Chamber Contamination
- Mungunsuvd Gerelt-Od, Konyakhin F.Y., Vishnevskiy A.S., Lopaev D.V., Vorotilov K.A., Rakhimova T.V., Baklanov M.R.
- в журнале Russian Microelectronics, издательство Maik Nauka/Interperiodica Publishing (Russian Federation), том 54, № 8, с. 1329-1338 DOI